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Semiconductor Metrology  Support

Lower your cost of maintaining metrology equipment and systems.

Wafer Inspection Services, Inc. offers comprehensive semiconductor metrology legacy support.

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OEM systems supported:

 

  • UV1250

  • UV1280

  • Aset F5X

  • Spectra FX 100

  • Spectra FX 200

  • Surfscan 6000 series

  • SP1, SP1-TBi, SP1-DLS, SP2

  • RS Series

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Metrology Legacy Support Services:

  • Audits

  • Installations & Deinstallations

  • Lock down / Prep for shipment

  • Applications, Metrology, Operator & Maintenance Training

  • Preventative & Corrective Maintenance

  • Technical Support

  • Per Call Service

  • Full Time On Site Service

NIST Calibration Standards

  • Particle Deposition Services

  • Surface Defect Calibration Standards

  • Reticles

  • Wafers

  • Particle deposition systems

  • Deposition Services

    • WaferCalibration Standards100, 150, 200, 300, 450mm wafers

    • Post-deposition inspection with SP2 (200mm and 300mm only)

    • +PhotomaskCalibration Standards 6”x6”x1/4” photomasks (reticles)

    • Blanks, Resist Film, Patterned

    • Optical, EUV

    • +Customer-supplied substrates

  • +Full, Spot, Ring, Arc deposit patterns

    • +Particles Available:10nm –20μm

    • PSL Spheres

    • SiO2Spheres

Process Particles

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