Semiconductor Metrology Support
Lower your cost of maintaining metrology equipment and systems.
Wafer Inspection Services, Inc. offers comprehensive semiconductor metrology legacy support.
OEM systems supported:
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UV1250
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UV1280
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Aset F5X
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Spectra FX 100
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Spectra FX 200
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Surfscan 6000 series
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SP1, SP1-TBi, SP1-DLS, SP2
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RS Series
Metrology Legacy Support Services:
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Audits
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Installations & Deinstallations
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Lock down / Prep for shipment
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Applications, Metrology, Operator & Maintenance Training
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Preventative & Corrective Maintenance
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Technical Support
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Per Call Service
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Full Time On Site Service
NIST Calibration Standards
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Particle Deposition Services
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Surface Defect Calibration Standards
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Reticles
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Wafers
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Particle deposition systems
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Deposition Services
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WaferCalibration Standards100, 150, 200, 300, 450mm wafers
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Post-deposition inspection with SP2 (200mm and 300mm only)
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+PhotomaskCalibration Standards 6”x6”x1/4” photomasks (reticles)
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Blanks, Resist Film, Patterned
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Optical, EUV
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+Customer-supplied substrates
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+Full, Spot, Ring, Arc deposit patterns
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+Particles Available:10nm –20μm
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PSL Spheres
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SiO2Spheres
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Process Particles
