XY Scan, Bare Silicon Surface Inspection, manual load/unload system

Wafer Size: 100mm, 125mm, 150mm and 200mm

Sensitivity: 0.15um (PSL equivalent)

Size Channels: 0.15um, 0.22um, 0.3um, 0.5um, 1.0um, 3.0um and 5.0um+

Repeatability: < 5% variability of mean

Utilities: 115VAC @ 3amp, house vacuum and temperature-controlled cleanroom environment

Size/Weight: 30” X 30” X 30” @ 250lbs

• REFURBISHMENT/EXCHANGE PROGRAM

• 2213-75TSLKTB

• KLA-Tencor model numbers:

       AIT-3 

       AIT-XP

       AIT-2

       SP1-DLS

• NEW

• Refurbished

• Used on KLA-Tencor Surfscan tools

• Model Number: AIT-1

• 2214-30-SLQRT

• New 30 MW Argon Laser with Alignment Rings

• Mounted/Aligned

• Used on KLA-Tencor 

• Model Numbers:

      6000

      6200

      6220

      6420

      SP1