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Available Items

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SDM-100
Surface Defect Monitoring (SDM) System

XY Scan, Bare Silicon Surface Inspection, manual load/unload system

Wafer Size: 100mm, 125mm, 150mm and 200mm

Sensitivity: 0.15um (PSL equivalent)

Size Channels: 0.15um, 0.22um, 0.3um, 0.5um, 1.0um, 3.0um and 5.0um+

Repeatability: < 5% variability of mean

Utilities: 115VAC @ 3amp, house vacuum and temperature-controlled cleanroom environment

Size/Weight: 30” X 30” X 30” @ 250lbs

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KLA Tencor Laser Refurbishment

  • REFURBISHMENT/EXCHANGE PROGRAM

  • 2213-75TSLKTB

  • KLA-Tencor model numbers:

       AIT-3 

       AIT-XP

       AIT-2

       SP1-DLS

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30MW Argon Laser

  • NEW

  • Refurbished

  • Used on KLA-Tencor Surfscan tools

  • Model Number: AIT-1

  • 2214-30-SLQRT

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2214-30-SLQTC

  • New 30 MW Argon Laser with Alignment Rings

  • Mounted/Aligned

  • Used on KLA-Tencor 

  • Model Numbers:

      6000

      6200

      6220

      6420

      SP1

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SSL 30MW 

Solid State Laser

Drop in Replacement

Three (3) Year Factory Backed Warranty

Used on KLA-Tencor 

Model Numbers:

     6000

     6200

     6220

     6420

     SP1

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2214-30-SLQTT Enclosure

30MW Argon Laser/Enclosure

Used on KLA-Tencor

Model Number: 7700

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Wafer Inspection Systems

NEW

Refurbished

Used on KLA-Tencor Surfscan Tools:

    6200

    6220

    6400

    6420

    SP1

    SP1 TBI

    SP2

    AIT1

    AIT2

Laser models: 

     2214-30-SLQTC

     2214-30-SLQTA

     2214-30-SLWIS

     2214-30-SLQRT

     2214030-SLQTT

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NIST Calibration Wafers

     Using an MSP 2300G3 Particle D

     Deposition System sets the standard for wafer      inspection and metrology equipment.

     Increases yield for leading-edge devices.

     Certified Wafer and Reticle Contamination            Standards available for calibrating and  

     monitoring inspection systems.

     Reliable particle size standards for calibrating

     surface scanning equipment or particle

     counters.

     MSP covers all your particle and calibration

     needs with advanced technology.

     Measured on a KLA-Tencor SP2

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Wafer Scanning Services

0.15um Particle Detection                                      Wafer Inspection Services, Inc. provides non patterned surface scans for wafers and masks

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