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KLA-Tencor Tool Support since 1986​

Wafer Inspection Services, Inc. offers the following services and products:

  • Lasers; Argon, Solid State

  • KLA-Tencor / Thermawave / Prometrix

  • New surface scanners 0.152um particle detection â€‹

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  • Billable Support, 

  • Spare Parts

  • Consumables

 

Wafer Inspection Services, Inc. supports KLA-Tencor Legacy Tools.

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Innovative

Technology Solutions

Wafer scanning services available.

SP2:

Particle detection / bare Si from 37nm 

200mm / 300mm wafers 

SDM-100:

Particle detection / bare from Si 115nm

100mm to 200mm wafers

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New Wafer Scanners
0.15um Particle Detection

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