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KLA-Tencor Tool Support since 1986

Wafer Inspection Services, Inc. offers the following services and products:

  • On-site Full-Time Support

  • Equipment Refurbishment, 

  • Billable Support, 

  • Remote Technical Support

  • System Audits

  • Installations

  • De-Installations

  • Qualifications

  • Acceptance

  • Spare Parts

  • Consumables

 

Wafer Inspection Services, Inc. supports KLA-Tencor Legacy Tools.

0.15um Particle Detection
New Wafer & Mask Scanners:
 

0.15um Particle Detection:   

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