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KLA-Tencor Tool Support since 1986

Exclusive Sales Representative for Silver Sage, LLC

  • New submicron surface scanners, Silver Sage, LLC

  • New 30mW Solid State Lasers for KL A-Tencor tools (drop-in replacement)

  • New 30mW Argon Lasers

  • Refurbishment of 30mW Lasers

  • Lasers for several OEMS, New or Refurbishment

  • NIST Traceable Calibration Standards

  • KLA - Tencor Surfscan & Thin Film Tool Service & Parts

Surface Defect Monitoring (SDM) System

  • XY Scan, Bare Silicon Surface Inspection, manual load/unload system

  • Wafer Size: 100mm, 125mm, 150mm and 200mm

  • Sensitivity: 0.15um (PSL equivalent)

  • Size Channels: 0.15um, 0.22um, 0.3um, 0.5um, 1.0um, 3.0um and 5.0um+

  • Repeatability: < 5% variability of mean (see report)

  • Utilities: 115VAC @ 3amp, house vacuum and temperature-controlled cleanroom environment

  • Size/Weight: 30” X 30” X 30” @ 250lbs

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