| Manufacturer | Model | Description |
|
Lam Research
|
TCP9600SE
|
Metal Etcher
|
|
Lam Research
|
TCP9400SE
|
Poly Etcher
|
|
Lam Research
|
4520
|
Oxide Etcher
|
|
Lam Research
|
4500
|
Oxide Etcherr
|
|
Lam Research
|
4400
|
Poly Etcher
|
|
Lam Research
|
590
|
Oxide Etcher
|
|
Lam Research
|
490
|
Nitride/Poly Etch System(s)
|
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