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Equipment Listings
 
ManufacturerModelDescription
Ulvac - IW-630
Ion Implantation System
TEL (Tokyo Electron Ltd)
Alpha 8-SE
LPCVD Vertical Diffusion Furnace
TEL (Tokyo Electron Ltd)
Alpha-8SE-E
Vertical Oxide Diffusion Furnace
TEL (Tokyo Electron Ltd)
Alpha-303I-H
Vertical Poly Furnace
SVG
8000 AVP-16
Verticle Diffusion Furnace
SVG
VTR7000
Vertical Thermal Reactor(s)
FSM - 900-TC-VAC
Integrated Metrology Annealing Chamber(s)
FSM - Laminar II
Chip Adhesion Tester
FSI International
Mercury
PVDF Turntable(s)
Axcelis Technologies
Easton - GSD P/N 1183060
Ion Implanter Process Disk(s)
Axcelis Technologies
Matrix - Jaguar 300SQ
2-Chamber Resist Asher
Axcelis Technologies
Fusion - M200PC
UV Cure Photostabilizer
Axcelis Technologies
Eaton - GSD 200E2
High Current Implanter
Applied Materials
8115
Etchers
Applied Materials
Centura 5200
IPS Oxide Chamber
 
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